p-Si(111), ρ = 1000 Ω-cm
Au, 50 keV, 5e14 /cm2 dose
Spot |
Spot size |
Laser used |
Shooting conditions |
Result |
---|---|---|---|---|
A |
2.5x2.5 mm2, masked |
Harvard YAG, 355 nm |
1 shot @ 0.7 J/cm2 |
good |
B |
2.5x2.5 mm2, masked |
Harvard YAG, 355 nm |
1 shot @ 0.7 J/cm2 |
good |
C |
2.5x2.5 mm2, masked |
Harvard YAG, 355 nm |
1 shot @ 0.7 J/cm2 |
good |
D |
2.5x2.5 mm2, masked |
Harvard YAG, 355 nm |
1 shot @ 0.7 J/cm2 |
good |