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Sample Fabrication

Substrate # Need update

n-Si(100), ρ = 1-10 Ω-cm

Implantation conditions

Au, 50 keV, 6e15 /cm2 dose

Pulsed laser melting # Need update

Spot

Spot size

Laser used

Shooting conditions

Result

A

2.5x2.5 mm2, masked

Harvard YAG, 355 nm

1 shot @ 0.7 J/cm2

good

B

2.5x2.5 mm2, masked

Harvard YAG, 355 nm

1 shot @ 0.7 J/cm2

dirty spot, bad TRR

C

2.5x2.5 mm2, masked

Harvard YAG, 355 nm

1 shot @ 0.7 J/cm2

good

D

2.5x2.5 mm2, masked

Harvard YAG, 355 nm

1 shot @ 0.7 J/cm2

good

E

2.5x2.5 mm2, masked

Harvard YAG, 355 nm

1 shot @ 0.7 J/cm2

good

Measurements and Processing

Sample 11I
  • 9/26/2012         UV-VIS transmission and measurement
    20120926 AuSi Sample 6-11 UV-VIS.xlsx
  • 2/28/2013         1x1mm Device Active Area, 1550nm Laser Diode, Photodiode Responsivity Mapping
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