Sample Master List
Sample ID |
Substrate |
Implantation conditions |
Laser spot |
Spot size |
PLM conditions |
Good/Bad |
Characterization |
Notes |
Current location |
Owner |
|---|---|---|---|---|---|---|---|---|---|---|
n-Si(100), P doped |
Au, 50 keV, 1e14 /cm2 |
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A |
2.5 x 2.5 mm2, masked |
Harvard YAG355, 1 shot, 0.7 J/cm2 |
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MIT |
Jonathan |
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|
|
B |
2.5 x 2.5 mm2, masked |
Harvard YAG355, 1 shot, 0.7 J/cm2 |
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|
|
MIT |
Jonathan |
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|
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C |
2.5 x 2.5 mm2, masked |
Harvard YAG355, 1 shot, 0.7 J/cm2 |
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|
|
MIT |
Jonathan |
|
|
|
D |
2.5 x 2.5 mm2, masked |
Harvard YAG355, 1 shot, 0.7 J/cm2 |
|
Raman |
|
Benet |
Jay |
|
|
|
E |
2.5 x 2.5 mm2, masked |
Harvard YAG355, 1 shot, 0.7 J/cm2 |
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|
|
Benet |
Jay |
n-Si(100), P doped |
Au, 50 keV, 5e14 /cm2 |
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|
|
|
|
|
|
|
|
|
|
|
A |
2.5 x 2.5 mm2, masked |
Harvard YAG355, 1 shot, 0.7 J/cm2 |
Good |
|
|
MIT |
Jonathan |
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|
|
B |
2.5 x 2.5 mm2, masked |
Harvard YAG355, 1 shot, 0.7 J/cm2 |
Bad |
SEM, EBSD, TEM |
Single Crystal |
MIT |
Jonathan |
|
|
|
C |
2.5 x 2.5 mm2, masked |
Harvard YAG355, 1 shot, 0.7 J/cm2 |
Good |
|
|
MIT |
Jonathan |
|
|
|
D |
2.5 x 2.5 mm2, masked |
Harvard YAG355, 1 shot, 0.7 J/cm2 |
|
Raman |
|
Benet |
Jay |
|
|
|
E |
2.5 x 2.5 mm2, masked |
Harvard YAG355, 1 shot, 0.7 J/cm2 |
|
|
|
Benet |
Jay |
p-Si(111), B doped |
Au, 50 keV, 1e14 /cm2 |
|
|
|
|
|
|
|
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|
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|
|
A |
2.5 x 2.5 mm2, masked |
Harvard YAG355, 1 shot, 0.7 J/cm2 |
Bad |
SEM, EBSD, TEM |
Stacking Faults |
MIT |
Jonathan |
|
|
|
B |
2.5 x 2.5 mm2, masked |
Harvard YAG355, 1 shot, 0.7 J/cm2 |
Bad |
|
|
MIT |
Jonathan |
|
|
|
C |
2.5 x 2.5 mm2, masked |
Harvard YAG355, 1 shot, 0.7 J/cm2 |
Good |
|
|
MIT |
Jonathan |
|
|
|
D |
2.5 x 2.5 mm2, masked |
Harvard YAG355, 1 shot, 0.7 J/cm2 |
Good |
|
|
MIT |
Jonathan |
|
|
|
E |
2.5 x 2.5 mm2, masked |
Harvard YAG355, 1 shot, 0.7 J/cm2 |
|
Raman |
|
Benet |
Jay |
|
|
|
F |
2.5 x 2.5 mm2, masked |
Harvard YAG355, 1 shot, 0.7 J/cm2 |
|
|
|
Benet |
Jay |
p-Si(111), B doped |
Au, 50 keV, 5e14 /cm2 |
|
|
|
|
|
|
|
|
|
|
|
|
A |
2.5 x 2.5 mm2, masked |
Harvard YAG355, 1 shot, 0.7 J/cm2 |
|
SEM, EBSD |
Stacking Faults |
MIT |
Jonathan |
|
|
|
B |
2.5 x 2.5 mm2, masked |
Harvard YAG355, 1 shot, 0.7 J/cm2 |
|
|
|
MIT |
Jonathan |
|
|
|
C |
2.5 x 2.5 mm2, masked |
Harvard YAG355, 1 shot, 0.7 J/cm2 |
|
Raman |
|
Benet |
Jay |
|
|
|
D |
2.5 x 2.5 mm2, masked |
Harvard YAG355, 1 shot, 0.7 J/cm2 |
|
|
|
Benet |
Jay |
n-Si(100), P doped |
Au, 50 keV, 1e15 /cm2 |
|
|
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|
|
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A |
2.5 x 2.5 mm2, masked |
Benet YAG355, 1 shot, 0.65 J/cm2 |
Non-Uniform |
SEM |
No sign of Breakdown |
Harvard |
Austin |
|
|
|
B |
2.5 x 2.5 mm2, masked |
Benet YAG355, 1 shot, 0.65 J/cm2 |
Non-Uniform |
SEM |
No sign of Breakdown |
Harvard |
Austin |
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