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Sample Fabrication

Substrate

n-Si(100), ρ = ? Ω-cm

Implantation conditions

Au, 50 keV, 1e15 /cm2 dose

Pulsed laser melting

Spot

Spot size

Laser used

Shooting conditions

Result

A

2.5x2.5 mm2, masked

Benet YAG, 355 nm

1 shot @ 0.65 J/cm2

 

B

2.5x2.5 mm2, masked

Benet YAG, 355 nm

1 shot @ 0.65 J/cm2

 

Measurements and processing

Sample 5A
Sample 5B
  • 8/21/2012           SEM, non-uniform surface but no sign of breakdown.

AuSi Jeff YAG 1e15 Spot b 475 kx.tif
AuSi Jeff YAG 1e15 Spot b 103 kx.tif
AuSi Jeff YAG 1e15 Spot b 335 x 2.tif
AuSi Jeff YAG 1e15 Spot b 335 x.tif

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